Tokyo Electron : Announcement on Changes in Corporate Director, Audit & Supervisory Board Member, and Personnel Changes

Tokyo Electron Limited (TEL) announces that its Board of Directors has decided on the list of candidates for Corporate Director and Audit & Supervisory Board Member on April 26, 2016. The official resolution on these matters will be made at the Annual General Meeting of Shareholders held on June 17, 2016. Additionally, TEL announces that the following personnel changes have been decided in connection with the changes in Corporate Director above.

1. Changes in Corporate Director and Audit & Supervisory Board Member
(i) Eleven Candidates for Corporate Director
Tetsuo Tsuneishi
Toshiki Kawai
Hirofumi Kitayama
Tetsuro Hori
Gishi Chung
Masami Akimoto
Sadao Sasaki
Tatsuya Nagakubo
Tetsuro Higashi
Hiroshi Inoue (Outside Director)
Charles Ditmars Lake II (Outside Director) *

*current position
President, Member of the Board of Directors, Aflac International Incorporated
Representative and Chairman, Aflac Japan

(ii) Two Candidates for Audit & Supervisory Board Member
Shojiro Mori
Ryuji Sakai(Outside Audit & Supervisory Board Member)

(iii) Three Retiring Corporate Directors
Hikaru Ito
Kenji Washino
Masahiro Sakane (Outside Director)

2．Personnel Changes for Corporate Director Effective on June 17th, 2016 *
*The effective date for overseas subsidiaries depends on registration procedure of each country.

Name	Continuing Position**	New Position	Current Position
Hikaru Ito	Chairman of the Board, Tokyo Electron (Shanghai) Ltd.	Chairman of the Board, Tokyo Electron Taiwan Ltd. Chairman of the Board, Tokyo Electron Singapore Pte. Ltd. Member of the Board, Tokyo Electron (Kunshan) Ltd.	Corporate Director, EVP & General Manager, Global Field Division Member of the Board, Tokyo Electron America, Inc. Manager, TEL Technology Center, America, LLC Member of the Board, TEL FSI, Inc. Member of the Board, Tokyo Electron Europe Ltd. Member of the Board, Tokyo Electron Korea Ltd. Chairman of the Board, Tokyo Electron (Shanghai) Logistic Center Ltd. Member of the Board, Tokyo Electron Taiwan Ltd. Member of the Board, Tokyo Electron Singapore Pte. Ltd.
Kenji Washino	SVP & General Manager Member of the Board, TEL NEXX, Inc.	General Manager, ATSBU	Corporate Director, Deputy General Manager, Global Field Division, Member of the Board, Tokyo Electron U.S. Holdings, Inc. Chairman of the Board, Tokyo Electron America, Inc. Manager, TEL Technology Center, America, LLC Member of the Board, TEL Epion Inc. Chairman of the Board, Tokyo Electron Europe Ltd.

3. Personnel Changes for Representative Directors of Subsidiary Effective on June 17th, 2016*
*The effective date for overseas subsidiaries depends on registration procedure of each country.

Name	Continuing Position**	New Position	Current Position
Archie Hwang	－	Vice Chairman of the Board, Tokyo Electron Taiwan Ltd.	Chairman of the Board, Tokyo Electron Taiwan Ltd.
Masaaki Hata	Member of the Board, Tokyo Electron Singapore Pte. Ltd.	General Manager, Taiwan RegionPresident & Member of the Board, Tokyo Electron Taiwan Ltd.	Deputy General Manager, Taiwan Region Senior Executive Vice President & Member of the Board,Tokyo Electron Taiwan Ltd. Chairman of the Board,Tokyo Electron Singapore Pte. Ltd.
Ryuichi Komatsubara	－	Fellow (Special mission)	General Manager, Taiwan Region President & Member of the Board,Tokyo Electron Taiwan Ltd.

4. Personnel Changes for Executive Officers Effective on June 17th, 2016

Name	Continuing Position**	New Position	Current Position
Hideyuki Tsutsumi	SVP & General Manager	General Manager, Global Field Division	Deputy General Manager(ES/TPS)
Yuichi Abe	－	Senior Manager, Marketing of Back End Process, Development & Production Division	VP & General Manager ATSBUGM

** Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.