■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.

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Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

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Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

SMC Corporation published this content on 16 January 2017 and is solely responsible for the information contained herein.
Distributed by Public, unedited and unaltered, on 16 January 2017 08:25:05 UTC.

Original documenthttp://www.smcworld.com/newproducts/en/xla/

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